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Semiconductor CMP Slurry
 
AZO, ZnO, GZO Targets

Transparent conductive, aluminum-doped and undoped AZO (ZnO) target for use in displays, touch screens, Solar Cell, OLED and other thin film applications.
Chemical Data
Composition
- AZO target : Standard is 98wt% ZnO + 2wt% Al2O3, (consistent to within¡¾ 0.5 wt%)
- ZnO target : ¡Ã99.99wt% Zinc Oxide
- GZO Target : The ratio is flexible upon by Customer


Purity : ¡Ã 99.99%
Physical Data
- ANP¡¯s ITO target has been made by utilizing its specialized nano powder production including raw material manufacturing process in house which ensures customers a superior, high quality end products
- Density : ANP¡¯s AZO & ZnO target has the high density of >99.5% of the theoretical density GZO Target has the high Density >99%
- Appreance : Planar or Cylinder
- Size : Different sizes and Shapes for Customer¡¯s needs
- Target Surface Resistivity : 5x10-3 §Ù/square
AZO, ZnO, GZO Rotary Target

AZO Rotary Target Specifiaction Composition : 98wt% ZnO + 2wt% Al2O3
Actual Density : >5.5 g/§¨ (Above 98% of the theoretical material density )
Purity : Above 99.99%
Product Characteristics
- ANP¡¯s ITO target has been made by utilizing its specialized nano powder production including raw material manufacturing process in house which ensures customers a superior, high quality end products
- ANP¡¯s TCO targets for Thin Film Solar Cell has been made by utilizing its specialized nano powder production including raw material manufacturing process in house which ensures customers a superior, high quality end products
- High Transparence : > 85%??????
- No or Little Time Dependency of Physical Properties
- No or Little Scattering Particles during Evaporation
- Rare occurrence of crack development during evaporation
Data of Quality Analysis(by ICP)
Elements Result (ppm) Elements Result (ppm)
Ag 0.427 Na 8.85
Ca 9.8 Ni 3.257
Cd 0.514 Pb 2.114
Fe 4.914 Si 8.98
K 8.912 W 1.2
Mg 6.2 Zr 9.482
Product Application Area
Transparent Conductive Electrode for Thin Film Solar Cell