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ANP¡¯s AZO Target
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ANP¡¯s AZO Target |
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Principal Uses |
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Sputtering of ITO for use in displays, touch screens, solar cell, OLED and other thin film applications. |
thin film target |
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Chemical Data |
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1. Composition
Standard is 98wt% ZnO + 2wt% Al2O3,
(consistent to within ¡¾ 0.5 wt%)
Other ratios are available on request
2. Purity
4N (99.99 wt%)
Data of Quality Analysis (by ICP)
Purity : ¡Ã 99.99%
Elements |
Result of Analysis(ppm) |
Ag |
0.427 |
Ca |
9.800 |
Cd |
0.514 |
Fe |
4.914 |
K |
8.912 |
Mg |
6.200 |
Na |
8.850 |
Ni |
3.257 |
Pb |
2.114 |
Si |
8.980 |
W |
1.200 |
Zr |
9.482 |
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Physical Data |
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1. Density
ANP¡¯s AZO taregt(Thin Film Target) yields the highest density of 99%
of the theoretical density(5.61g/§¨, 2wt% Al2O3)
2. Electrical resistivity
~ 500 ¥ì¥Ø§¯
3. Dimension
Different sizes and shapes
for Customer¡¯s needs
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