ITO Sputtering Target  
 
 ITO Sputtering Target  
 

 
 Product ¼Ò°³  
  ANP´Â ITO ÄÚÆÃ Á¦Ç°¿¡ Àû¿ëµÇ´Â ÃÖ»ó±ÞÀÇ ITO targetÀ» »ý»êÇÏ¿© ÀüÀÚ flat panet display, touch pannel contacts, energy Àý¾à & ÀÚµ¿Â÷ À¯¸®, ±¤ÀüÀÚ¿Í Å¾翭 pannel µî¿¡ »ç¿ë µÇ°í ÀÖ½À´Ï´Ù.  
 Á¦Ç°ÀÇ Æ¯¼º  
  1. ±¸ ¼º
- Ç¥ÁØ spec 90wt% In2O3 + 10 wt%SnO2
- °í°´ÀÇ ¿ä±¸¿¡ ÀÇÇØ Á¶Àý °¡´É

2. ¹Ð µµ
- TargetÀÇ ¹Ðµµ ¹üÀ§´Â °í°´ÀÇ ¿äû¿¡ ÀÇÇØ low & ultra high grade·Î º¯°æÀÌ °¡´É ÇÕ³ª´Ù.
- ANP¡¯s ultra high ITO yields ´Â 99%ÀÇ ¹Ðµµ¸¦ Áö´Õ´Ï´Ù.

Product
Density(g/cm3)
Deposit Method
Low Density Tablet
3.0 ~ 5.0
E-beam, Ion Plating
Super High Density Target
¡Ã7.1
Ion Plating, Sputtering

3. ¼ø µµ
¡Ã 99.99%

4. Ä¡ ¼ö
- °í°´ÀÇ ¿äû¿¡ ÀÇÇØ ¸ð¾çÀ̳ª Å©±â°¡ ´Ù¸¨´Ï´Ù.
 
 Á¦Ç°ÀÇ Æ¯¼º  
  - ANPÀÇ ITO target±¸¼ºÀº raw material »ý»ê processÀ» Æ÷ÇÔÇÏ¿© Ưº°ÇÑ nano podwer·Î
  Á¦ÀÛÀÌ µÇ¸ç ÀÌ Á¦Ç°Àº °í°´ Á¦Ç°ÀÇ ÁúÀ» ¶Ù¾î³ª°Ô Çâ»ó ½ÃÄÑ ÁÝ´Ï´Ù.
- ¶Ù¾î³­ Àüµµ¼º : < ¥ñ = 1.7¡¿10-4 §Ù¡¤§¯
- High Transparence : > 85%
- ¹°¸®Àû ¹ÝÀÀ¿¡ ´ëÇÑ ½Ã°£ ³¶ºñÀÇ Àý¾à
- Áõ¹ß ½Ã°£ µ¿¾ÈÀÇ 0%¿¡ °¡±î¿î Scattering Particles
- Áõ¹ß ÇÏ´Â µ¿¾ÈÀÇ 0%¿¡ °¡±î¿î CrackÇö»ó
 
 Microscopic photo  
   
 Á¦Ç° Àû¿ë ºÐ¾ß  
  - Transparent Conductive Electrode (LCD, Touch Panel Screen, PDP, Organic EL and etc)
- EMI Shield Coating
 
 ±× ¿ÜÀÇ sputtering targets  
  - Zinc Oxide
- Indium Zinc Oxide
- Aluminum Zinc Oxide
- Indium Zinc Gallium Oxide
- Others (Metal & Metal Oxide target)